Iyo kemikari-mechanical polishing (CMP) inowanzobatanidzwa nekugadzira nzvimbo dzakatsetseka nemakemikari reaction, kunyanya inoshanda muindasitiri yekugadzira semiconductor.Lonnmeter, mugadziri anovimbwa ane makore anopfuura makumi maviri ehunyanzvi mukuyera inline yekuyerwa, inopa mamiriro-ye-iyo-hunyanzvi.non-nuclear density metresuye viscosity sensors kugadzirisa matambudziko e slurry management.
Iko kukosha kweSlurry Hunhu uye Lonnmeter's Nyanzvi
Iyo kemikari mechanical polishing slurry ndiyo musana weCMP maitiro, kutarisa kufanana uye kunaka kwepamusoro. Kusaenderana slurry density kana viscosity inogona kutungamira kune hurema hwakaita senge diki-zvikwenya, kusaenzana kubviswa kwezvinhu, kana kuvhara padhi, kukanganisa wafer mhando uye kuwedzera mitengo yekugadzira. Lonnmeter, mutungamiri wepasi rose mune zviyereso zvekuyerwa kwemaindasitiri, anonyanya kuyera inline slurry kuyerwa kuti ave nechokwadi chekuita kwakaringana slurry. Iine rekodhi rekodhi rekodhi yekuunza yakavimbika, yakakwirira-chaiyo sensors, Lonnmeter yakabatana nevanotungamira semiconductor vagadziri kuti vawedzere maitiro ekutonga nekuita. Yavo isiri-nyukireya slurry density metres uye viscosity sensors inopa chaiyo-nguva data, ichigonesa gadziriso chaiyo kuchengetedza slurry kuenderana uye kusangana nezvinoda kuomesesa zvemazuva ano semiconductor kugadzira.
Anopfuura makumi maviri emakore echiitiko mu inline yekuyera kuyerwa, yakavimbika nepamusoro semiconductor mafemu. Lonnmeter's sensors dzakagadzirirwa kubatanidzwa kusina musono uye zero kugadzirisa, kuderedza kushandiswa kwemari.Tailored solutions kuti isangane nezvinodiwa maitiro ekugadzirisa, kuve nechokwadi chepamusoro-soro yezvibereko uye kutevedza.
Basa reKemikari Mechanical Kuchenesa muSemiconductor Kugadzira
Chemical mechanical polishing (CMP), inonziwo kemikari-mechanicha planarization, ibwe repakona rekugadzira semiconductor, inogonesa kugadzirwa kwenzvimbo dzakafuratira, dzisina hurema dzekugadzirwa kwechip chip. Nekubatanidza kemikari etching ne mechanical abrasion, iyo CMP process inova nechokwadi chechokwadi chinodiwa kune akawanda-layered akabatanidzwa maseketi pane node pazasi 10nm. Iyo kemikari mechanical polishing slurry, inoumbwa nemvura, makemikari reagents, uye abrasive particles, inopindirana nepepuru yekupukuta uye wafer kubvisa zvinhu zvakafanana. Sezvo semiconductor dhizaini inoshanduka, iyo CMP maitiro anotarisana nekuwedzera kuoma, inoda kudzora kwakasimba pamusoro peslurry zvivakwa kudzivirira hurema uye kuwana yakatsetseka, yakakwenenzverwa wafers inodiwa neSemiconductor Foundries uye Materials Suppliers.
Maitiro acho akakosha pakugadzira 5nm uye 3nm machipisi ane hurema hudiki, hunova nechokwadi chekuti nzvimbo dzakati sandara dzekuisa kwakaringana kwezvikamu zvinotevera. Kunyangwe kusawirirana kudiki kwe slurry kunogona kutungamira kune inodhura rework kana kurasikirwa kwegoho.
Matambudziko Mukutarisa Slurry Properties
Kuchengeta kunoenderana slurry density uye viscosity mune kemikari mekiniki yekupolisha maitiro akazara nematambudziko. Slurry zvivakwa zvinogona kusiyana nekuda kwezvinhu zvakaita sekutakura, dilution nemvura kana hydrogen peroxide, kusakwana musanganiswa, kana kuparara kwemakemikari. Semuyenzaniso, chidimbu chinogadzika mune slurry totes chinogona kukonzera yakakwira density pazasi, zvichitungamira kune isina-uniform polishing. Nzira dzechinyakare dzekutarisa senge pH, oxidation-reduction potential (ORP), kana conductivity kazhinji haina kukwana, sezvo ivo vachitadza kuona shanduko dzisiri munyoro mukuumbwa kwe slurry. Izvi zvinogumira zvinogona kukonzera kuremara, kuderedzwa kwemitengo yekubvisa, uye kuwedzera mari inoshandiswa, zvichiunza njodzi dzakakura kune vanogadzira michina yesemiconductor uye vanopa masevhisi eCMP. Compositional shanduko panguva yekubata uye kugovera inokanganisa mashandiro. Sub-10nm node dzinoda kudzora kwakasimba pamusoro pekuchena kwetsvina uye kusanganisa chaiko. pH uye ORP inoratidza kushomeka kusiyanisa, nepo conductivity inosiyana nekuchembera kwakashata. Zvisingawirirani slurry zvivakwa zvinogona kuwedzera hurema hunosvika makumi maviri muzana, pazvidzidzo zveindasitiri.
Lonnmeter's Inline Sensors yeChaiyo-Nguva Monitoring
Lonnmeter inogadzirisa matambudziko aya neayo epamberi asiri-nuclear slurry density metres uyeviscosity sensors, kusanganisira viscosity mita inline ye-in-line viscosity zviyero uye iyo ultrasonic density mita yenguva imwechete slurry density uye viscosity yekutarisa. Aya masensa akagadzirirwa kusanganisa isina musono muCMP maitiro, ane indasitiri-yakajairwa yekubatanidza. Mhinduro dzeLonnmeter dzinopa kuvimbika kwenguva refu uye yakaderera kugadzirisa kwekuvaka kwayo kwakasimba. Iyo chaiyo-nguva data inogonesa vashandisi kukwenenzvera-tune slurry musanganiswa, kudzivirira kuremara, uye optimize kukwenenzvera kuita, zvichiita kuti maturusi aya ave akakosha kune Analysis uye Kuedza Equipment Suppliers uye CMP Consumables Suppliers.
Mabhenefiti ekuenderera mberi kwekutarisa kweCMP Optimization
Kuenderera mberi kwekutarisa neLonnmeter's inline sensors inoshandura iyo kemikari mechani yekupolisha maitiro nekuunza zvinogoneka kuona uye yakakosha mari yekuchengetedza. Real-time slurry density kuyerwa uye viscosity yekutarisa inoderedza kuremara senge makwara kana kuwanda-kukwenenzverwa nekusvika makumi maviri muzana, zvichienderana neindasitiri mabhenji. Kubatanidzwa nePLC sisitimu inogonesa otomatiki dosing uye maitiro ekugadzirisa, kuve nechokwadi chekuti slurry zvivakwa zvinogara mukati meakakwana mazinga. Izvi zvinotungamira kukudzikiswa kwe15-25% mumitengo inodyiwa, kudzikiswa nguva, uye yakagadziridzwa wafer kufanana. Kune Semiconductor Foundries uye CMP Services Providers, mabhenefiti aya anodudzira kune yakawedzera goho, yakakwira purofiti, uye kutevedzera zviyero zvakaita seISO 6976.
Yakajairika Mibvunzo Nezve Slurry Monitoring muCMP
Nei slurry density kuyerwa kwakakosha kuCMP?
Slurry density kuyerwa kunovimbisa yunifomu kugovaniswa uye kusanganisa kuenderana, kudzivirira kukanganisika uye optimize yekubvisa mitengo mumakemikari mechani yekupolisha maitiro. Inotsigira emhando yepamusoro kugadzirwa kwewafer uye kutevedzera indasitiri zviyero.
Kutarisisa viscosity kunosimudzira sei CMP kushanda zvakanaka?
Viscosity yekutarisa inochengetedza kutenderera kuyerera, kudzivirira nyaya dzakaita senge pad clogging kana kusaenzana kupukuta. Lonnmeter's inline sensors inopa chaiyo-nguva data kukwidziridza maitiro eCMP uye kugadzirisa goho rewafer.
Chii chinoita kuti Lonnmeter isiri-nuclear slurry density metres ive yakasiyana?
Lonnmeter's isiri-nuclear slurry density metres inopa panguva imwe chete density uye viscosity zviyero zvine hupamhi hwepamusoro uye zero kugadzirisa. Dhizaini yavo yakasimba inovimbisa kuvimbika mune inoda CMP process nharaunda.
Real-time slurry density kuyerwa uye viscosity yekutarisa kwakakosha pakugadzirisa kemikari mechaniki yekupolisha maitiro mukugadzira semiconductor. Lonnmeter's isiri-nuclear slurry density metres uye viscosity sensors inopa Semiconductor Equipment Manufacturers, CMP Consumables Suppliers, uye Semiconductor Foundries ane maturusi ekukunda slurry manejimendi matambudziko, kuderedza kuremara, uye kuderera mutengo. Nekuunza chaiyo, chaiyo-nguva data, mhinduro idzi dzinosimudzira mashandiro ekuita, kuve nechokwadi chekutevedzera, uye kutyaira pundutso mumusika weCMP wemakwikwi. VisitWebhusaiti yeLonnmeterkana kubata timu yavo nhasi kuti vaone kuti Lonnmeter inogona kushandura sei makemikari ako emuchina wekupolisha mashandiro.
Nguva yekutumira: Jul-22-2025
